Anais do Congresso Anual da ABM


ISSN 2594-5327

65º Congresso ABM vol. 65, num.65 (2010)


Título

Ti-Al-Si-C-N HARD COATINGS SYNTHESIZED BY HYBRID ARC ENHANCED MAGNETRON SPUTTERING

Ti-Al-Si-C-N HARD COATINGS SYNTHESIZED BY HYBRID ARC ENHANCED MAGNETRON SPUTTERING

DOI

10.5151/2594-5327-16951

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Resumo

Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.

 

Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.

Palavras-chave

Ti-Al-Si-C-N coatings; Nanostructure; Hardness; Friction.

Ti-Al-Si-C-N coatings; Nanostructure; Hardness; Friction.

Como citar

Wu, Guizhi; Liu, Sitao; Ma, Shengli; Xu, Kewei; Ji, Vincent; Chu, Paul K. Ti-Al-Si-C-N HARD COATINGS SYNTHESIZED BY HYBRID ARC ENHANCED MAGNETRON SPUTTERING , p. 4543-4552. In: 65º Congresso ABM, Rio de Janeiro, 2010.
ISSN: 2594-5327 , DOI 10.5151/2594-5327-16951