ISSN 2594-5327
65º Congresso ABM — Vol. 65, Num. 65 (2010)
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DOI
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Resumo
Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.
Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.
Palavras-chave
Ultrasonic cleaning; Cleanliness; Decoating.
Ultrasonic cleaning; Cleanliness; Decoating.
Como citar
Ederle, Henry Percy.
CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS,
p. 4129-4136.
In: 65º Congresso ABM,
Rio de Janeiro,
2010.
ISSN: 2594-5327, DOI 10.5151/2594-5327-16833
