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Proceedings of ABM Annual Congress

ISSN 2594-5327

65º Congresso ABM — vol. 65, num.65 (2010)

Title

CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS

CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS

Authorship

Ederle, Henry Percy

Ederle, Henry Percy
Ederle, Henry Percy

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DOI

10.5151/2594-5327-16833

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Abstract

Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.

 

Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.

Keywords

Ultrasonic cleaning; Cleanliness; Decoating.

Ultrasonic cleaning; Cleanliness; Decoating.

How to refer

Ederle, Henry Percy. CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS , p. 4129-4136. In: 65º Congresso ABM, Rio de Janeiro, 2010.
ISSN: 2594-5327 , DOI 10.5151/2594-5327-16833