Title

CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS

CLEANING PRIOR TO PVD/CVD-COATING, DETERMINATION OF THE CLEANLINESS AND CHEMICAL DECOATING OF PVD/CVD-LAYERS

Authorship

EDERLE, HENRY PERCY

EDERLE, HENRY PERCY

I am this author

DOI

10.5151/2594-5327-16833

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Abstract

Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.

Cleaning prior to PVD/CVD coating is a key issue to achieve high yield in PVD/CVD coating processes. This article covers the principles of aqueous cleaning prior to PVD/CVD coating, describes the methods to determine the cleanliness and give a survey about the chemical decoating processes of PVD/CVD-layers.

Keywords

Ultrasonic cleaning; Cleanliness; Decoating.

Ultrasonic cleaning; Cleanliness; Decoating.