Title

ELECTRON BEAM INDUCED RECRYSTALLIZATION IN METAL - CARBON THIN FILMS

ELECTRON BEAM INDUCED RECRYSTALLIZATION IN METAL - CARBON THIN FILMS

Authorship

LEONTIEVA, OKSANA; POLIAKOV, VLADIMIR PROKOFIEVICH; KRIUKOVA, LIUDMILA

LEONTIEVA, OKSANA

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POLIAKOV, VLADIMIR PROKOFIEVICH

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KRIUKOVA, LIUDMILA

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DOI

10.5151/2594-5327-C00230-3573-3586

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Abstract

The direct transmission electron microscopy investigation of structural changes in the thin metal films (Ni, V, Cu, Ag) induced by electron irradiation is carried out. Metal films, with thickness 50 nm, were received by a method of hot wire vapour deposition, in vacuum 10⁻⁴ Pa, on a previously deposited carbon substrate with thickness 10 nm. The irradiation was carried out directly in a column of transmission electronic microscope, the electron beam with energy 120 KeV was used. For all metals the process of a recrystallization of initial nanocrystalline films (size of a grain ~10 nm) was observed. The influence of irradiation regime on the mechanism of recrystallization process was investigated. For Ni and V films at the certain irradiation regime the formation of an intermediate phase – non-stoichiometric carbides Ni₃C and V₂C was observed. In this case recrystallization results in the formation of large grains with twinning structure. The non-thermal effect caused by the electron beam is discussed.

The direct transmission electron microscopy investigation of structural changes in the thin metal films (Ni, V, Cu, Ag) induced by electron irradiation is carried out. Metal films, with thickness 50 nm, were received by a method of hot wire vapour deposition, in vacuum 10⁻⁴ Pa, on a previously deposited carbon substrate with thickness 10 nm. The irradiation was carried out directly in a column of transmission electronic microscope, the electron beam with energy 120 KeV was used. For all metals the process of a recrystallization of initial nanocrystalline films (size of a grain ~10 nm) was observed. The influence of irradiation regime on the mechanism of recrystallization process was investigated. For Ni and V films at the certain irradiation regime the formation of an intermediate phase – non-stoichiometric carbides Ni₃C and V₂C was observed. In this case recrystallization results in the formation of large grains with twinning structure. The non-thermal effect caused by the electron beam is discussed.

Keywords

transmission electron microscopy, metal films, recrystallization

transmission electron microscopy, metal films, recrystallization