ISSN 2594-5327
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Abstract
This study investigates the application of nanoporous alumina to fabricate nanorod arrays by using pre-ceramic polymers. Anodized thin films of aluminum supported on silicon could have several applications that involve integrating the nanoporous structures into chemical and biological sensors and as templates for creating hierarchically complex nanostructures that are integrated with microelectronic circuits. A new fabrication method for making nanorod arrays was introduced. In this method, nanoporous alumina was used as a casting mold for being filled by a preceramic polymer. To understand the changes in the chemical structure during the different steps of curing process of these pre-ceramic polymers and also to find a better process for fabrication of nanorod arrays, the effect of curing conditions on these preceramic polymers were investigated.
This study investigates the application of nanoporous alumina to fabricate nanorod arrays by using pre-ceramic polymers. Anodized thin films of aluminum supported on silicon could have several applications that involve integrating the nanoporous structures into chemical and biological sensors and as templates for creating hierarchically complex nanostructures that are integrated with microelectronic circuits. A new fabrication method for making nanorod arrays was introduced. In this method, nanoporous alumina was used as a casting mold for being filled by a preceramic polymer. To understand the changes in the chemical structure during the different steps of curing process of these pre-ceramic polymers and also to find a better process for fabrication of nanorod arrays, the effect of curing conditions on these preceramic polymers were investigated.
Keywords
Nanoporous; Alumina; Silicon carbide; Nanorod arrays; Pre-ceramic polymer; Curing.
Nanoporous; Alumina; Silicon carbide; Nanorod arrays; Pre-ceramic polymer; Curing.
How to refer
Monfared, Negar A.;
Onbattuvelli, Valmikanathan P.;
Souza, Jupiter Palagi de;
Enneti, Ravi K.;
Atre, Sundar V..
FABRICATION OF SILICON CARBIDE NANOROD ARRAYS
USING NANOPOROUS ALUMINA FILMS
,
p. 1854-1863.
In: 67º Congresso da ABM - Internacional / 12º ENEMET - Encontro Nacional de Estudantes de Engenharia Metalúrgica, de Materiais e de Minas,
Rio de Jabeiro,
2012.
ISSN: 2594-5327
, DOI 10.5151/2594-5327-21168