Title

NANOFRETTING BEHAVIOR OF SI(100) AND ITS COATING1

NANOFRETTING BEHAVIOR OF SI(100) AND ITS COATING

Authorship

QIAN, LINMAO; CHEN, LEI; YU, JIAXIN; YU, BINGJUN; ZHOU, ZHONGRONG

QIAN, LINMAO

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CHEN, LEI

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YU, JIAXIN

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YU, BINGJUN

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ZHOU, ZHONGRONG

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DOI

10.5151/2594-5327-15985

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Abstract

With an atomic force microscopy, the nanofretting behaviors of Si(100) and its coating were investigated at various displacement amplitudes (0.5~250 nm) under atmosphere and vacuum conditions. It was found that the adhesion force may induce the increase in the maximum static friction force and prevent the contact pair from slipping. The nanofretting damage on silicon may experience two processes, namely as the generation of hillocks at low load and the formation of grooves at high load. A ultrathin hard DLC coating could reduce about 75% of the nanofretting damage on Si(100) substrate.

With an atomic force microscopy, the nanofretting behaviors of Si(100) and its coating were investigated at various displacement amplitudes (0.5~250 nm) under atmosphere and vacuum conditions. It was found that the adhesion force may induce the increase in the maximum static friction force and prevent the contact pair from slipping. The nanofretting damage on silicon may experience two processes, namely as the generation of hillocks at low load and the formation of grooves at high load. A ultrathin hard DLC coating could reduce about 75% of the nanofretting damage on Si(100) substrate.

Keywords

Nanofretting; Si(100); DLC coating; AFM.

Nanofretting; Si(100); DLC coating; AFM.