Title

Ti-Al-Si-C-N HARD COATINGS SYNTHESIZED BY HYBRID ARC ENHANCED MAGNETRON SPUTTERING

Ti-Al-Si-C-N HARD COATINGS SYNTHESIZED BY HYBRID ARC ENHANCED MAGNETRON SPUTTERING

Authorship

Wu, Guizhi; Liu, Sitao; Ma, Shengli; Xu, Kewei; Ji, Vincent; Chu, Paul K

Wu, Guizhi

I am this author

Liu, Sitao

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Ma, Shengli

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Xu, Kewei

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Ji, Vincent

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Chu, Paul K

I am this author

DOI

10.5151/2594-5327-16951

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Abstract

Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.

Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- and macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.

Keywords

Ti-Al-Si-C-N coatings; Nanostructure; Hardness; Friction.

Ti-Al-Si-C-N coatings; Nanostructure; Hardness; Friction.